Mist supplying device for forming thin film

Details Mist supplying device for forming thin film Mist supplying device for forming thin film

1987-06-30

1988-11-08

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Motor or spray fluid operated continuously moving discharge...

239432, 239590, 239592, 239597, 366332, 366340, 118300, 118715, 261 81, B05B 100, B05B 134

Patent

active

047830069

ABSTRACT:
A mist supplying device for supplying a film-forming solution to form a thin film on a substrate includes a nozzle having an elongate outlet port, an atomizer coupled to the nozzle for atomizing the film-forming solution, and a disperser movably disposed in the nozzle between the outlet port and the atomizer and having a plurality of substantially uniformly distributed mist passages for passing the atomized film-forming solution in a first flow passage direction therethrough. An air blower is coupled to the atomizer for delivering the atomized film-forming solution into the nozzle. A driver unit is coupled to the disperser for reciprocally moving the mist passages in a second flow passage direction transverse to the first flow passage direction.

REFERENCES:
patent: 3917888 (1975-11-01), Beam et al.
patent: 4562095 (1985-12-01), Coulon et al.
patent: 4624213 (1986-11-01), Long et al.
patent: 4649857 (1987-03-01), Hayashi et al.

Affiliated with

Also associated with

Rating

Mist supplying device for forming thin film does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mist supplying device for forming thin film, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mist supplying device for forming thin film will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-460473