Misalignment tolerant antifuse

Details Misalignment tolerant antifuse Misalignment tolerant antifuse

1990-11-05

1992-02-11

Prenty, Mark

Fishing, trapping, and vermin destroying

357 59, 357 54, 437922, H01L 2904, H01L 2702, H01L 2934

Patent

active

050879588

ABSTRACT:
A misalignment tolerant antifuse includes a lower electrode, bounded by a relatively thick first insulating layer, an upper electrode separated from the lower electrode by a second insulating layer having a thickness less than that of the first insulating layer, a pair of antifuse window regions in the second insulating layer, abutting the first insulating layer on opposite sides of the lower electrode, the insulating material in the window regions being thinner than the remainder of the second insulating layer, and an upper electrode disposed above the second insulating layer and lying over the pair of regions and at least a portion of the first insulating layer.

REFERENCES:
patent: 4899205 (1990-02-01), Hamdy et al.
patent: 5019532 (1991-05-01), Kaya

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