Misalignment sensor for a wafer feeder assembly

Details Misalignment sensor for a wafer feeder assembly Misalignment sensor for a wafer feeder assembly

1986-05-21

1988-05-17

Dorner, Kenneth J.

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

356152, 414786, A61K 2702

Patent

active

047447133

ABSTRACT:
In an ion implantation device having a wafer holder assembly with a plurality of wafer holders each with a retractable wafer clamp and a wafer feeder for loading a wafer onto each wafer holder, there is provided a misalignment sensor which includes a light source for directing a collimated beam of light onto each wafer holder once a wafer has been loaded onto a corresponding wafer holder but before being clamped. A light sensor is coupled to the light souce for detecting light reflected at a predetermined angle from a loaded wafer. A display is provided for indicating misalignment of a wafer in response to the absence of reflected light being detected by the sensor at a predetermined time following loading.

REFERENCES:
patent: 4402053 (1983-08-01), Kelley et al.
patent: 4444492 (1984-04-01), Lee
patent: 4486842 (1984-12-01), Hermann
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4553069 (1985-11-01), Purser
patent: 4603897 (1983-08-01), Foulke et al.
patent: 4611966 (1986-09-01), Johnson
patent: 4615615 (1986-10-01), Krolak et al.

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