1986-02-19
1987-01-06
Carroll, J.
357 4, 357231, 357 41, 357 45, 357 56, H01L 2712, H01L 2978, H01L 2702, H01L 2906
Patent
active
046350896
ABSTRACT:
The present invention aims to form a MOST, for example a MOS-SIT, whose impurity density in a channel region is lower than an ordinary MOST on a substrate or is formed in an epitaxial growth layer on a well.
REFERENCES:
patent: 4161417 (1979-07-01), Yim et al.
patent: 4472871 (1984-09-01), Green et al.
patent: 4487639 (1984-12-01), Lam et al.
L. M. Terman, "Combining Bipolar and FET Devices on a Single Silicon Substrate", IBM Technical Disclosure Bulletin, vol. 11 (1969), pp. 1270-1271.
Adams Bruce L.
Burns Robert E.
Carroll J.
Kabushiki Kaisha Daini Seikosha
Lobato Emmanuel L.
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