MIS-based sensors with hydrogen selectivity

Measuring and testing – Gas analysis

Reexamination Certificate

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Reexamination Certificate

active

07340938

ABSTRACT:
The invention provides hydrogen selective metal-insulator-semiconductor sensors which include a layer of hydrogen selective material. The hydrogen selective material can be polyimide layer having a thickness between 200 and 800 nm. Suitable polyimide materials include reaction products of benzophenone tetracarboxylic dianhydride 4,4-oxydianiline m-phenylene diamine and other structurally similar materials.

REFERENCES:
patent: 5698771 (1997-12-01), Shields et al.
patent: 6041643 (2000-03-01), Stokes et al.
patent: 6155100 (2000-12-01), Stokes et al.
patent: 6182500 (2001-02-01), Stokes et al.
patent: 6202473 (2001-03-01), Stokes et al.
patent: 6450007 (2002-09-01), O'Connor
patent: 6539774 (2003-04-01), Zinck et al.
patent: 6634213 (2003-10-01), O'Connor et al.
patent: 6730270 (2004-05-01), O'Connor
patent: 6895805 (2005-05-01), Hoagland
patent: 2004/0023087 (2004-02-01), Redmond
Åbom et al. (2002) “Thin Oxide Films as Surface Modifiers of MIS Field Effect Gas Sensors,”Sens. Actuators B85:109-119.
Armgarth et al. (Oct. 1, 1982) “Palladium and Platinum Gate Metal-Oxide-Semiconductor Capacitors in Hydrogen and Oxygen Mixtures,”Appl. Phys. Lett. 41:654-655.
Baker, R. (2000)Membrane Technology and Applications, New York, McGraw-Hill, pp. 312.
Borodzinski et al. (1997) “Surface Heterogeneity of Supported Pd Catalyst for the Hydrogenation of Acetylene-Ethylene Mixtures,”Langmuir13:883-887.
Dannetun et al. (1986) “Dehydrogenation of Acetyl and Ethylene Studied on Clean and Oxygen Covered Palladium Surfaces,”Surf. Sci. 173:148-159.
Eriksson et al. (1998) “Real Time Measurements of Hydrogen Dessorption and Absorption During CO Exposures of Pd: Hydrogen Sticking and Dissolution,”Appl. Surf. Sci. 133:89-97.
Eriksson et al. (1997) “The Influence of CO on the Response of Hydrogen Sensitive Pd-MOS Devices,”Sens. Actuators B42:217-223.
Ghosh et al. (1996) “Polyimides for Gas Separation,” In;Polyimides, Fundamentals and Applications, Langsam, M. ed., New York, Marcel Dekker, Inc., p. 721-736.
Hedborg et al. (1993) “Some Studies of Molecularly-Imprinted Polymer Membranes in Combination ith Field-Effect Devices,”Sens. Actuators A37-38:796-799.
Hedborg et al. (1992) “Polymer Membranes for Modification of the Selectivity of Field-Effect Gas Sensors,”Sensors and Actuators B7:661-664.
Hughes et al. (1997) “Hydrogen Sensing in Vacuum Systems with Catalytic Field Plae MNOS Capacitors,”Appl. Surf. Sci. 115:74-79.
Iacona et al. (Apr. 1991) “Interfacial Reactions in Polymide Metal Systems,”J. Mater. Res. 6:861.
Jeong et al. (Published on Web Sep. 9, 2004) “Fabrication of Polymer/Selective-Flake Nanocomposite Membranes and Their Use in Gas Separation,”Chem. Mater. 16:3838-3845.
Johansson et al. (Jul. 1, 1998) “Bridging the Pressure Gap for Palladium Metal-Insulator-Semiconductor Hydrogen Sensors in Oxygen Containing Environments,”J. Appl. Phys. 84:44-51.
Kaichev et al. (Published on web Mar. 25, 2003) “High-Pressure Studies of CO Adsorption on Pd(1 1 1) by X-ray Photoelectron Spectroscopy and Sum-Frequency Generation,”J. Phys. Chem. B107:3522-3527.
Koros et al. (1993) “Membrane-Based Gas Separation,”J. Membr. Sci. 83:1-80.
Lee et al. (Published on Web Jun. 26, 2002) “Preparation and Characterization of SiO2Composite Membranes for Purification of Hydrogen for PEMFC,”Industrial. Eng. Chem. Res. 41:3594-3600.
Lee et al. (2003) “Preparation and Characterization of SiO2Composite Membrane for Purification of Hydrogen from Methynol Steam Reforming as an Energy Carrier System for PEMFC,”Separation and Purification Technol. 32:45-50.
Li et al. (Published on Web Jun. 7, 2006) “Application of Polymer-Coated MIS Sensors in Detection of Dissolved Hydrogen,”Appl. Phys. Lett. 88:233507.
Li et al. (Published on Web Oct. 13, 2005) “Effects of a Polyimide Coating on the Hydrogen Selectivity of MIS Sensors,”Sens. Actuators B115:86-92.
Liu et al. (Apr. 29, 1999) “Gas Permeability and Permselectivity of Photochemically Crosslinked Copolimides,”J. Appl. Poly. Sci. 73(4):521-526.
Lundstrom, I. (1996) “Why Bother about Gas-Sensitive Field-Effect Devices,”Sens. Actuators A56:75-82.
Lundstrom, I. (1981) “Hydrogen Sensitive Mos-Structures: 1. Principles and Applications,”Sens. Actuators1:403-426.
Lundstrom, I. (1981) “Hydrogen Sensitive Mos-Structures: 2. Characterization,”Sens. Actuators2:105-138.
Medlin et al. (Feb. 15, 2003) “Effects of Competitive CO Adsorption on the Hydrogen Response of MIS Sensors: The Role of Metal Film Morphology,”J. Appl. Phys. 93:2267-2274.
Medlin et al. (2003) “The Response of Palladium Metal0Insulator-Semiconductor Devices to Hydrogen-Oxygen Mixtures: Comparisons Between Kinetic Models and Experiment,”Sens. Actuators B96:290-297.
Medlin et al. (Published on Web Dec. 10, 2002) “A Theoretical Study of the Adsorption of Acetylene on the (1 1 1) Surfaces of Pd, Pt, Ni, and Rh,”J. Phys. Chem. B107:217-223.
Monnier et al. (2000) “Selective Isomerization of 2,5-Dihydrofuran to 2,3-Dihydrofuran Using CO-Modified, Supported Pd Catalysis,”Appl. Catal. A194-195:463-474.
Robins, I. (1993) “Drift Effects in Transition-Metal Gate MOS and MISFETs,”Sens. Actuators B15:238.
Rose et al. (2002) “Ordered Structures of CO on Pd(1 1 1) Studied by STM,”Surf. Sci. 512:48-60.
Sawada et al. (Published on Web Sep. 26, 1998) “Synthesis, Characterization, and Optical Properties of Metal-Containing Fluorinated Polyimide Films,”Chem. Mater. 10:3368-3378.
Stacchiola et al. (2002) “Ethylene Adsorption on Pd (1 1 1) Studied Using Infrared Reflection-Adsorption Spectroscopy,”Surf. Sci. 511:215-228.
Stern et al. (1989) “Structure Permeability Relationships of Polyimide Membranes—Applications to the Separation of Gas-Mixtures,”J. Poly. Sci. A. Poly. Chem. 27(9):1887-1909.
Sullivan et al. (Published on Web Dec. 5, 2002) “Ultrathin, Gas-Selective Polyimide membranes Prepared from Multilayer Polyelectrolyte Films,”Chem. Mater. 15:281-287.
Tanaka et al. (1992) “Permeability and Permselectivity of Gases in Fluorinated and Non-Fluorinated Polyimides,”Polymer33(3):585-592.
Tanaka et al. (1989) “Gas-Permeability and Permselectivity in Polyimides Based on 3,3′,4,4′-Biphenyltetracarboxylic Dianhydride,”J. Membr. Sci. 47(1-2):203-215.
Tanaka et al. (1992) “Effect of Methyl Substituents on Permeability and Permselectivity of Gases in Polyimides Prepared from Methyl-Substituted Phenylenediamines,”J. Poly. Sci. B. Poly. Phys. 30(8):907-914.
Watwe et al. (Mar. 8, 2001) “Density Functional Theory Studies of the Adsorption of Ethylene and Oxygen on Pt(1 1 1) and Pt3Sn(1 1 1),”J. Chem. Phys. 114(10):4663-4668.

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