Mirror surface characteristic testing

Optics: measuring and testing – Lens or reflective image former testing – For optical transfer function

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Details

356127, 356153, 356354, 356363, 356374, G01B 1127

Patent

active

051875390

ABSTRACT:
An apparatus and method are disclosed for characterizing the surface of mirrors in which a cross-grid type phase grating is illuminated from behind by light reflected from the mirror so as to create a grid-like interference pattern when observed along an observation axis. The fringe lines in the generated or observed interference pattern are correlated to the grating and observed for relative displacement from the grating axis. Apparent fringe index numbers for the fringe lines are used to determine coefficients for a plurality of monomial series which are in turn used to derive Zernike coefficients from which a wavefront contour is obtained. In order to reduce alignment errors during analysis, each fringe line is subtracted from the next lower order line and before monomial coefficients are determined. In further embodiments of the invention, the fringe pattern is transferred, using one or more lenses, to an image digitizer such as a CCD camera which is coupled to a digital computation device that analyzes the observed fringes and computes the series coefficients and then translates them into Zernike coefficient values which are used to reconstruct the mirror surface contours.

REFERENCES:
patent: 4692003 (1987-09-01), Adachi et al.
patent: 4818108 (1989-04-01), Eppinger
patent: 5066119 (1991-11-01), Bertrand
patent: 5066120 (1991-11-01), Bertrand
patent: 5076689 (1991-12-01), Adachi
patent: 5080477 (1992-01-01), Adachi

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