Mirror rocking member for optical deflector

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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Reexamination Certificate

active

07057784

ABSTRACT:
There is disclosed a mirror rocking member for an optical deflector. The optical deflector comprises the mirror rocking member for deflecting light, and a driver for driving the member. The mirror rocking member comprises a movable plate having a reflective surface, an elastic member for rockably supporting the movable plate, and a support for supporting the elastic member. The movable plate has an electric element, which constitutes a part of the driver. The movable plate includes a first portion having the reflective surface, and a second portion including an electric element. The first portion has a reflective-surface forming surface with the reflective surface formed thereon, the second portion has an electric-element forming surface with the electric element formed thereon, and the reflective-surface forming surface has an area smaller than an area of the electric-element forming surface.

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patent: 0 686 863 (1995-12-01), None
patent: 10/62709 (1998-03-01), None
Asada, N., et al., “Silicon micro-optical scanner”, Sensors and ActuatorsA, Elsevier Sequola S.A. Lausanne, CH, vol. 83, No. 1-3, May 2000, pp. 284-290.

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