Mirror rocking member for optical deflector

Details Mirror rocking member for optical deflector Mirror rocking member for optical deflector

2006-06-06

2006-06-06

Cherry, Euncha P. (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07057784

ABSTRACT:
There is disclosed a mirror rocking member for an optical deflector. The optical deflector comprises the mirror rocking member for deflecting light, and a driver for driving the member. The mirror rocking member comprises a movable plate having a reflective surface, an elastic member for rockably supporting the movable plate, and a support for supporting the elastic member. The movable plate has an electric element, which constitutes a part of the driver. The movable plate includes a first portion having the reflective surface, and a second portion including an electric element. The first portion has a reflective-surface forming surface with the reflective surface formed thereon, the second portion has an electric-element forming surface with the electric element formed thereon, and the reflective-surface forming surface has an area smaller than an area of the electric-element forming surface.

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Asada, N., et al., “Silicon micro-optical scanner”, Sensors and ActuatorsA, Elsevier Sequola S.A. Lausanne, CH, vol. 83, No. 1-3, May 2000, pp. 284-290.

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