Mirror for an integrated device

Details Mirror for an integrated device Mirror for an integrated device

2006-02-21

2006-02-21

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S224200, C359S900000

Reexamination Certificate

active

07002719

ABSTRACT:
A mirror for an optical MEMS device has a plurality of segments supported on a substrate layer. Each segment includes a support post, a support layer, and a reflective layer formed over the support layer. The reflective layers of the plurality of segments form the reflective surface of the mirror. Due to the relatively small lateral dimensions of the segments, the mirror has a smaller thermal bow than prior art mirrors. The bow can be controlled, e.g., by appropriately choosing the number of segments and the layer thicknesses.

REFERENCES:
patent: 3896338 (1975-07-01), Nathanson et al.
patent: 5233456 (1993-08-01), Nelson
patent: 5552924 (1996-09-01), Tregilgas
patent: 6201631 (2001-03-01), Greywall

Affiliated with

Also associated with

Rating

Mirror for an integrated device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mirror for an integrated device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mirror for an integrated device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3671417