Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2008-03-18
2008-03-18
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000, C359S294000
Reexamination Certificate
active
07345809
ABSTRACT:
The invention relates to a method for manufacturing a mirror device with anti-reflective coating layer. The method of the invention comprises: (a) forming an anti-reflective metal film on a first surface of a mirror material to be a mirror device; (b) defining a plurality of mirror units from the mirror device, each mirror unit having a mirror layer and an anti-reflective metal film unit, the anti-reflective metal film unit formed on a first surface of the mirror layer; and (c) defining an anti-reflective coating layer from the anti-reflective metal film unit, the anti-reflective coating layer formed on edges of the first surface of the mirror layer. According to the invention, the anti-reflective coating layer on the mirror layer can shield a bright area caused by fringe effect so as to minimize the bad influence of the fringe effect. In manufacture, the method of the invention follows the semiconductor manufacturing process, and has high precision and simple process.
REFERENCES:
patent: 4952026 (1990-08-01), Bellman et al.
patent: 6437903 (2002-08-01), Kozhukh
patent: 6828595 (2004-12-01), Leng
Greece James R
Himax Technologies Inc.
Ladas & Parry LLP
Mack Ricky
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