Optical: systems and elements – Optical modulator – Light wave directional modulation
Reexamination Certificate
2006-02-21
2006-02-21
Robinson, Mark A. (Department: 2872)
Optical: systems and elements
Optical modulator
Light wave directional modulation
C359S224200
Reexamination Certificate
active
07002730
ABSTRACT:
The mirror device has a mirror2, and a supporting mechanism which elastically supports the mirror2on a substrate1in a state in which the mirror floats from the substrate1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts3A,3B and3C that mechanically connect the substrate1and mirror2. Each of the supporting parts3A,3B and3C has one or more plate spring parts5that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part5is connected to the substrate1via a leg part9which has a rising part that rises from the substrate1. The other end portion of the plate spring part5is mechanically connected to the mirror2via a connecting part which has a rising part that rises from this other end portion. The mirror2is supported on the substrate1only via the plate spring part5of the respective3A,3B and3C. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.
REFERENCES:
patent: 5920421 (1999-07-01), Choi
patent: 6267605 (2001-07-01), Biegelsen
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6366414 (2002-04-01), Aksyuk et al.
patent: 6381381 (2002-04-01), Takeda et al.
patent: 6504643 (2003-01-01), Peeters et al.
patent: 6522445 (2003-02-01), Kleytman
patent: 6532093 (2003-03-01), Sun et al.
patent: 6785039 (2004-08-01), Wendland, Jr.
patent: 0 949 527 (1999-10-01), None
patent: 1 041 036 (2000-10-01), None
patent: 07-084196 (1995-03-01), None
patent: 08-320441 (1996-12-01), None
patent: 11-183810 (1999-07-01), None
patent: 2001-009798 (2001-01-01), None
patent: WO 95/20827 (1995-08-01), None
Akagawa Keiichi
Ishizuya Tohru
Frishauf Holtz Goodman & Chick P.C.
Nikon Corporation
Robinson Mark A.
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