Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2005-12-06
2005-12-06
Shafer, Ricky D. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S226200, C359S291000, C359S900000
Reexamination Certificate
active
06972884
ABSTRACT:
To provide a mirror device, an optical switch, an electronic instrument, and a mirror device driving method in which a large driving displacement can be produced for a mirror with a smaller driving force, a silicon substrate includes: at least one first mirror-side operating region integrally formed with the mirror and provided at a different position from the mirror; and at least one second mirror-side operating region provided at an end portion of the mirror, and a glass substrate includes: an opposite-side operating section, a coulomb force acting between the first mirror-side operating region and the opposite-side operating section; and another opposite-side operating section, the coulomb force acting between the second mirror-side operating region and the other opposite-side operating section. The glass substrate is formed so that a gap between the first mirror-side operating region and the opposite-side operating section is narrower than a gap between the second mirror-side operating region and the opposite-side operating section.
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T. Yasuda et al., “CMOS Drivable Electrostatic Microactuator With Large Deflection”,Proceedings of “MEMS” 97, Jan. 26, 1997, pp. 90-95.
Oliff & Berridg,e PLC
Seiko Epson Corporation
Shafer Ricky D.
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