Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-07-05
2005-07-05
Shafer, Ricky D. (Department: 2872)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S226200, C359S224200
Reexamination Certificate
active
06914712
ABSTRACT:
To provide a mirror device, an optical switch, an electronic instrument, and a mirror device driving method in which a large driving displacement can be produced for a mirror with a smaller driving force, a silicon substrate includes: at least one first mirror-side operating region integrally formed with the mirror and provided at a different position from the mirror; and at least one second mirror-side operating region provided at an end portion of the mirror, and a glass substrate includes: an opposite-side operating section, a coulomb force acting between the first mirror-side operating region and the opposite-side operating section; and another opposite-side operating section, the coulomb force acting between the second mirror-side operating region and the other opposite-side operating section. The glass substrate is formed so that a gap between the first mirror-side operating region and the opposite-side operating section is narrower than a gap between the second mirror-side operating region and the opposite-side operating section.
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Oliff & Berridg,e PLC
Seiko Epson Corporation
Shafer Ricky D.
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