Mirror device and MEMS device comprising layered electrode

Details Mirror device and MEMS device comprising layered electrode Mirror device and MEMS device comprising layered electrode

2009-10-30

2011-11-22

Choi, William (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224100, C359S295000

Reexamination Certificate

active

08064123

ABSTRACT:
The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.

REFERENCES:
patent: 5447600 (1995-09-01), Webb
patent: 5673139 (1997-09-01), Johnson
patent: 5818095 (1998-10-01), Sampsell
patent: 6128121 (2000-10-01), Choi et al.
patent: 6552840 (2003-04-01), Knipe
patent: 6735008 (2004-05-01), Brophy et al.
patent: 6744550 (2004-06-01), Neukermans et al.
patent: 6888521 (2005-05-01), Richards
patent: 6912336 (2005-06-01), Ishii et al.
patent: 6914709 (2005-07-01), Monroe et al.
patent: 6962419 (2005-11-01), Huibers
patent: 7022249 (2006-04-01), Valette
patent: 7068417 (2006-06-01), Yang
patent: 7079301 (2006-07-01), Monroe et al.
patent: 7206110 (2007-04-01), Kelly et al.
patent: 7302131 (2007-11-01), Ma et al.
patent: 7649673 (2010-01-01), Maeda et al.

Affiliated with

Also associated with

Rating

Mirror device and MEMS device comprising layered electrode does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mirror device and MEMS device comprising layered electrode, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mirror device and MEMS device comprising layered electrode will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4305095