Mirror array for lithography

Details Mirror array for lithography Mirror array for lithography

2006-06-07

2011-11-08

Nguyen, Hung Henry (Department: 2882)

Optical: systems and elements

Mirror

Fluid cooled mirror

C355S030000

Reexamination Certificate

active

08052289

ABSTRACT:
A mirror array apparatus includes a carrier configured to support a plurality of individually adjustable reflective elements. At least one actuator is associated with each reflective element, the actuator being configured to adjust the orientation or position of the associated reflective element. The apparatus further includes a liquid in contact with at least a portion of the reflective elements.

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