Mirror array and method for the manufacture thereof

Details Mirror array and method for the manufacture thereof Mirror array and method for the manufacture thereof

1994-03-23

1996-12-03

Dzierzynski, Paul M.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359224, 359291, 359850, G02B 2608

Patent

active

055813933

ABSTRACT:
A photoresist is deposited on a glass substrate for forming a separation layer. Then, an array of reflectors is generated on the separation layer; followed by a supporting layer thereon, which is made of a self-adhesive epoxy. Thereafter, an actuator array is bonded on the supporting layer. The separation layer is then removed to disengage the glass substrate. The mirror array formation is finalized by patterning the separation layer. Consequently, the above inventive process allows the fabrication of a mirror array in a simple manner without having to employ the electroplating process.

REFERENCES:
patent: 3746911 (1973-07-01), Nathanson et al.
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4592628 (1986-06-01), Altman et al.
patent: 5212582 (1993-05-01), Nelson

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