Mirror arrangement with a deformable mirror element

Details Mirror arrangement with a deformable mirror element Mirror arrangement with a deformable mirror element

1995-05-15

1997-04-01

Callahan, Timothy P.

Optical: systems and elements

Mirror

Fluid cooled mirror

359224, 359846, 359847, G02B 508

Patent

active

056172613

ABSTRACT:
A mirror arrangement with a deformable mirror element, and which includes a housing which is provided for the retention of the mirror element, and whereby a cooling installation is provided for the conducting off of excess heat or thermal energy from the mirror arrangement. The cooling installation possesses a cooling chamber or space provided in the housing which is streamed through by a flow of a cooling medium and which, through an inherently stable separator element constituted from a good heat-conductive material, is spatially separated from a heat-conductive filled outer chamber which is located directly behind the base plate of the mirror.

REFERENCES:
patent: 4387962 (1983-06-01), Gowan et al.
patent: 4674848 (1987-06-01), Aldrich et al.
patent: 5094519 (1992-03-01), Ealey et al.
Kosugi, Abstract of Japanese patent Document 63-205976, Patent Abstract of Japan, vol. 12, No. 493 (E-697) (3340), 1988.

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