Mirror actuator position sensor systems and methods

Details Mirror actuator position sensor systems and methods Mirror actuator position sensor systems and methods

2006-07-11

2006-07-11

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S231000

Reexamination Certificate

active

07075700

ABSTRACT:
Systems and methods are disclosed herein to provide position information, such as for example via a mirror actuator position sensor. For example, in accordance with an embodiment of the present invention, a mirror actuator is disclosed which utilizes its own capacitance to directly sense and provide mirror position information. The mirror position information may be utilized as a position feedback signal to assist in controlling a position of the mirror.

REFERENCES:
patent: 5036286 (1991-07-01), Holm-Kennedy et al.
patent: 6441449 (2002-08-01), Xu et al.
patent: 6480645 (2002-11-01), Peale et al.
patent: 6625341 (2003-09-01), Novotny
patent: 6985271 (2006-01-01), Yazdi et al.
patent: 2003/0174376 (2003-09-01), Sane et al.
Trey Roessig et al., “Mirrors with Integrated Position Sense Electronics for Optical-Switching Applications” (Analog Dialogue, vol. 36, No. 4, Jul.-Aug. 2002).

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