Mireau interference objective lens

Details Mireau interference objective lens Mireau interference objective lens

2006-05-30

2006-05-30

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

Microscope objective

C359S629000

Reexamination Certificate

active

07054071

ABSTRACT:
A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.

REFERENCES:
patent: 4639139 (1987-01-01), Wyant et al.
patent: 5073018 (1991-12-01), Kino et al.
patent: 5166751 (1992-11-01), Massig
patent: 5270860 (1993-12-01), Suzuki
patent: 6721094 (2004-04-01), Sinclair et al.
patent: 2005/0088663 (2005-04-01), De Groot et al.
patent: WO 97/40422 (1997-10-01), None

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