Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-08-18
2010-11-16
Choi, William C (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224100
Reexamination Certificate
active
07835062
ABSTRACT:
A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.
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Ichikawa Hirotoshi
Ishii Fusao
Maeda Yoshihiro
Sugimoto Naoya
Choi William C
Lin Bo-In
Olympus Corporation
Silicon Quest Kabushiki-Kaisha
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