Mircromirror device having a vertical hinge

Details Mircromirror device having a vertical hinge Mircromirror device having a vertical hinge

2007-08-18

2010-11-16

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224100

Reexamination Certificate

active

07835062

ABSTRACT:
A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.

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