Minienvironment for hazardous process tools

Details Minienvironment for hazardous process tools Minienvironment for hazardous process tools

1994-11-30

1996-08-27

Joyce, Harold

Ventilation

Workstation ventilator

Covered workbench chamber

454 57, B08B 1502

Patent

active

055495125

ABSTRACT:
A method and apparatus for providing a clean working area within an enclosure while simultaneously permitting open access to the working area from outside and also preventing any toxic substances from escaping the enclosure to contaminate a worker area. A higher pressure region within the enclosure near the aperture of the enclosure prevents dirt from entering and toxic materials from escaping.

REFERENCES:
patent: 3895570 (1975-07-01), Eagleson, Jr.
patent: 4637301 (1987-01-01), Shields
patent: 4682927 (1987-07-01), Southworth et al.
patent: 4880581 (1989-11-01), Dastoli et al.
patent: 4936922 (1990-06-01), Cherry
patent: 4976815 (1990-12-01), Hiratsuka et al.
patent: 5029518 (1991-07-01), Austin
patent: 5255710 (1993-10-01), Palmer
patent: 5259812 (1993-11-01), Kleinsek
Abstracts of Japan, May 1985, Hitachi KK.

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