Measuring and testing – Gas analysis – Detector detail
Reexamination Certificate
2006-09-12
2006-09-12
Cygan, Michael (Department: 2855)
Measuring and testing
Gas analysis
Detector detail
C073S025050
Reexamination Certificate
active
07104113
ABSTRACT:
The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.
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Knobloch Aaron Jay
Schultz Gerald
Tian Wei-Cheng
Zribi Anis
Cygan Michael
Ingraham Donald S.
Powell, III William E.
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