Measuring and testing – Gas analysis – Detector detail
Reexamination Certificate
2011-08-23
2011-08-23
Caputo, Lisa (Department: 2855)
Measuring and testing
Gas analysis
Detector detail
C257S253000
Reexamination Certificate
active
08001828
ABSTRACT:
A miniaturized Schottky diode hydrogen and hydrocarbon sensor and the method of making same is disclosed and claimed. The sensor comprises a catalytic metal layer, such as palladium, a silicon carbide substrate layer and a thin barrier layer in between the catalytic and substrate layers made of palladium oxide (PdOx). This highly stable device provides sensitive gas detection at temperatures ranging from at least 450 to 600° C. The barrier layer prevents reactions between the catalytic metal layer and the substrate layer. Conventional semiconductor fabrication techniques are used to fabricate the small-sized sensors. The use of a thicker palladium oxide barrier layer for other semiconductor structures such as a capacitor and transistor structures is also disclosed.
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Hunter Gary W.
Lukco Dorothy
Xu Jennifer C.
Caputo Lisa
Earp III Robert H.
Roy Punam
The United States of America as represented by the Administrator
Woodling Krost and Rust
LandOfFree
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