Miniaturized fabry-perot spectrometer for optical analysis

Details Miniaturized fabry-perot spectrometer for optical analysis Miniaturized fabry-perot spectrometer for optical analysis

1995-10-31

1998-10-06

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356352, G01B 902

Patent

active

058185860

ABSTRACT:
A miniaturized spectrometer for gas concentration measurement includes a radiation source for admitting electromagnetic radiation onto the gas to be measured, a detector for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector, control electronics circuitry for controlling the radiation source, the interferometer and the detector. The radiation source, the detector, the interferometer and the control electronics are integrated in a miniaturized fashion onto a common, planar substrate and the radiation source is an electrically modulatable micromechanically manufactured thermal radiation emitter.

REFERENCES:
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 5247186 (1993-09-01), Toda

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