Miniature valve and method of making same

Details Miniature valve and method of making same Miniature valve and method of making same

1983-10-27

1986-04-29

Jones, Larry

Valves and valve actuation

Electrically actuated valve

With means to bias valve open

251298, 137855, F16K 3102

Patent

active

045852090

ABSTRACT:
In a miniature valve, a valve seat is formed by aperturing a plate. A cantilever leaf spring is disposed overlying the apertured plate for controlling the flow of fluid therethrough. An electrostatic potential applied between the cantilever leaf spring and the valve plate pulls the leaf spring over the apertured plate for variably controlling flow through the valve in accordance with the magnitude of the applied potential. In a preferred embodiment, the cantilever leaf springs are made in batch form by etching a silicon wafer. A flow controller is provided by measuring the electrical capacitance of the valve, comparing it with a reference voltage and deriving a feedback voltage applied to the valve for controlling flow therethrough. In one embodiment, the width of the cantilever leaf spring valve member is narrowed toward its free end for finer control of flow.

REFERENCES:
patent: 155667 (1874-10-01), Painter
patent: 1438974 (1922-12-01), Wente
patent: 2230537 (1941-02-01), Heuschmann
patent: 2269374 (1942-01-01), Kuhnemann
patent: 2901623 (1959-08-01), Wouters
patent: 3295042 (1966-12-01), Evalds et al.
patent: 3544201 (1968-01-01), Fowler et al.
patent: 3736647 (1973-06-01), Roeder et al.
patent: 4142144 (1979-02-01), Rohr

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