Miniature tunable filter having an electrostatically...

Details Miniature tunable filter having an electrostatically... Miniature tunable filter having an electrostatically...

2008-07-29

2008-07-29

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Coupling networks

Wave filters including long line elements

C333S235000

Reexamination Certificate

active

11166032

ABSTRACT:
A miniature tunable filter comprising filter poles disposed with a filter substrate. A moveable electrically conductive membrane is disposed above each filter pole and is spaced from the filter pole by an air or vacuum gap. The gap spacing is changed by deflecting the membrane with an electrostatic voltage. The change in gap spacing varies the capacitive loading at the pole, thus providing tuning of the filter. The electrically conductive membrane is preferably manufactured on a separate substrate that is bonded to the filter body containing the filter substrate.

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Barker, N.S., “Distributed MEMS True-Time Delay Phase Shifters and Wide-Band Switches,”IEEE Transactions on Microwave Theory and Techniques, vol. 46, No. 11, pp. 1881-1890 (Nov. 1998).

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