Miniature silicon condenser microphone

Details Miniature silicon condenser microphone Miniature silicon condenser microphone

2007-07-10

2007-07-10

Chambliss, Alonzo (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

Insulating material

C257S724000, C381S355000, C381S361000

Reexamination Certificate

active

11112043

ABSTRACT:
A silicon condenser microphone package includes a transducer unit, a substrate, and a cover. The substrate includes an upper surface transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and either the cover or the substrate includes an aperture.

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