Miniature silicon condenser microphone

Details Miniature silicon condenser microphone Miniature silicon condenser microphone

1997-02-25

1999-02-09

Le, Huyen

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

381191, H04R 2500

Patent

active

058704825

ABSTRACT:
Multiple embodiments of a solid state condenser transducer, and methods of manufacture, are disclosed. The transducer comprises a semi-conductor substrate forming a frame and having an opening, a thin-film cantilever structure forming a diaphragm extending over a portion of the opening, the structure having a proximal portion and a distal portion. The proximal portion is attached to the frame, and the distal portion extends over a portion of the frame. A variable gap capacitor having a movable plate and a fixed plate is provided, wherein the movable plate is disposed on the distal portion of the structure and the fixed plate is disposed on the frame adjacent the movable plate.

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