Miniature scanning confocal microscope

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

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359223, 359224, 359198, 359900, 1566251, 156 60, G02B 2608

Patent

active

061543055

ABSTRACT:
A scanning mechanism for scanning light to scan a field of view, a method of micromachining the scanning device, and a method of operating the scanning device are disclosed.

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