Miniature piezo electric vacuum inlet valve

Valves and valve actuation – Electrically actuated valve – Having element dimensionally responsive to field

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251367, F16K 3102

Patent

active

057304173

ABSTRACT:
A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three.

REFERENCES:
patent: 3055631 (1962-09-01), Kippenhan
patent: 4695034 (1987-09-01), Shimizu et al.
patent: 4907748 (1990-03-01), Gardner et al.
patent: 5031841 (1991-07-01), Schafer

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