Miniature package for translation of sensor sense axis

Measuring and testing – Speed – velocity – or acceleration – Structural installation or mounting means

Reexamination Certificate

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Reexamination Certificate

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07467552

ABSTRACT:
A ceramic L-shaped or T-shaped packaging apparatus for a Micro Electro-Mechanical System (MEMS) inertial sensor die that translates the sensor sense axis perpendicular to the normal input plane for direct attachment to a system-level printed circuit board (PCB).

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patent: 5616863 (1997-04-01), Koen
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patent: 6109105 (2000-08-01), Kubena et al.
patent: 6577134 (2003-06-01), Farruggia et al.
patent: 2003/0209789 (2003-11-01), Hanson et al.
patent: 2004/0085159 (2004-05-01), Kubena et al.
patent: 2004/0169244 (2004-09-01), MacGugan

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