Miniature non-directional microphone

Details Miniature non-directional microphone Miniature non-directional microphone

2011-03-08

2011-03-08

Ni, Suhan (Department: 2614)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Housed microphone

C381S369000

Reexamination Certificate

active

07903835

ABSTRACT:
A miniature microphone comprising a diaphragm compliantly suspended over an enclosed air volume having a vent port is provided, wherein an effective stiffness of the diaphragm with respect to displacement by acoustic vibrations is controlled principally by the enclosed air volume and the port. The microphone may be formed using silicon microfabrication techniques and has sensitivity to sound pressure substantially unrelated to the size of the diaphragm over a broad range of realistic sizes. The diaphragm is rotatively suspend for movement through an arc in response to acoustic vibrations, for example by beams or tabs, and has a surrounding perimeter slit separating the diaphragm from its support structure. The air volume behind the diaphragm provides a restoring spring force for the diaphragm. The microphone's sensitivity is related to the air volume, perimeter slit, and stiffness of the diaphragm and its mechanical supports, and not the area of the diaphragm.

REFERENCES:
patent: 6088463 (2000-07-01), Rombach et al.
patent: 7103196 (2006-09-01), Warren
patent: 7146016 (2006-12-01), Pedersen
patent: 7171012 (2007-01-01), Izuchi et al.
patent: 2002/0164043 (2002-11-01), Paritsky et al.
patent: 2006/0280319 (2006-12-01), Wang et al.

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