Miniature microwave and millimeter wave tunable circuit

Details Miniature microwave and millimeter wave tunable circuit Miniature microwave and millimeter wave tunable circuit

1991-06-07

1992-12-01

Gensler, Paul

Wave transmission lines and networks

Attenuators

200181, 333262, 333263, H01P 122, H01P 110, H01P 120

Patent

active

051682494

ABSTRACT:
A miniature, electrostatically actuated, dynamically tunable circuit which is operable to tune a transmission line in response to control signals. This circuit is micromachined with the use of integrated circuit processes such that a fixed transmission line is fabricated on a substrate and a movable signal line is fabricated over the substrate and is movable relative to the fixed transmission line in response to electrostatic fields produced when the control signals are selectively applied to an array of air bridge stator control electrodes which span the transmission line.

REFERENCES:
patent: 4096453 (1978-06-01), Rogers
patent: 4472690 (1984-09-01), Hallford
patent: 4716389 (1987-12-01), Gawronski et al.
patent: 4906956 (1990-03-01), Kakihana
patent: 4922253 (1990-05-01), Nathanson et al.
patent: 5043043 (1991-08-01), Howe et al.

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