Miniature micromachined quadrupole mass spectrometer array and m

Details Miniature micromachined quadrupole mass spectrometer array and m Miniature micromachined quadrupole mass spectrometer array and m

1999-04-28

2000-04-11

Nguyen, Kiet T.

Electric heating

Metal heating

Cutting or disintegrating

250292, H01J 4942

Patent

active

060490527

ABSTRACT:
The present invention provides a quadrupole mass spectrometer and an ion filter, or pole array, for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

REFERENCES:
patent: 5384461 (1995-01-01), Jullien et al.
patent: 5852270 (1998-12-01), Holkeboer

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