Miniature micromachined quadrupole mass spectrometer array and m

Details Miniature micromachined quadrupole mass spectrometer array and m Miniature micromachined quadrupole mass spectrometer array and m

1998-06-03

2000-12-05

Nguyen, Kiet T.

Radiant energy

Ionic separation or analysis

Cyclically varying ion selecting field means

H01J 4942

Patent

active

06157029&

ABSTRACT:
The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

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