Miniature magnetometer-accelerometer

Measuring and testing – Speed – velocity – or acceleration – With response to a nonspeed condition

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Details

7351437, 7350404, 7315248, 7315259, 324260, 33365, G01P 300, G01R 3300, G01C 910

Patent

active

057394318

ABSTRACT:
A magnetometer is integrated with a miniature vibrating beam accelerometer fabricated out of silicon on a common substrate. Dual pendulum-DETF force sensing accelerometers have integrated conductor coils on the pendulums that circulate alternating current to cause an additional pendulum motion also sensed by the DETF transducers for sensing local earth magnetic field. The integrated magnetic and acceleration sensing is used for each of three reference axes in a triaxial inclinometer magnetometer for borehole drill steering and surveying.

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