Miniature magnetic field sensor

Details Miniature magnetic field sensor Miniature magnetic field sensor

2007-02-20

2007-02-20

Potter, Roy Karl (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Magnetic field

C438S048000

Reexamination Certificate

active

11210137

ABSTRACT:
A miniature magnetic field sensor including a magnetic core which co-operates with at least one excitation coil and a detection coil. In the magnetic field sensor, the core is open and includes at least one bar having tapered ends. A method of fabricating the sensor is provided using microtechnology techniques.

REFERENCES:
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patent: WO 92/01945 (1992-02-01), None
patent: WO 2004/077074 (2004-09-01), None
Deak et al., “A Low-Noise Single-Domain Fluxgate Sensor,” Appl. Phys. Lett. 69(8), Aug. 19, 1996.
Gottfried-Gottfried et al., “A Miniaturized Magnetic-Field Sensor System Consisting of a Planar Fluxgate Sensor and a Cmos Readout Circuitry,” Fraunhofer Institute for Microelectronic Circuits and Systems Ims Dresden, Germany—Sensor and Actuators A54 (1996) 443-447.
Grüger et al., “Performance and Applications of a Two Axes Fluxgate Magnetic Field Sensor Fabricated by a Cmos Process” Fraunhofer Institute for Microelectronic Circuits and Systems Ims Dresden, Germany—Sensor and Actuators A 91 (2001) 61-64.
Koga et al., “Micro Fluxgate Magnetic Sensor Interface Circuits Using ΔΣ Modulation,” Toyohashi Univ. of Technology—T IEE Japan, vol. 117-E, No. 2, (1997).
Rub et al., “High Directional Sensitivity of Micromachined Magnetic Fluxgate Sensors,” University of Cincinnati, Ohio, 45221-0030—USA, Transducers '01 EUROSENSORS Xv—2001.

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