Miniature dynamically tunable microwave and millimeter wave devi

Details Miniature dynamically tunable microwave and millimeter wave devi Miniature dynamically tunable microwave and millimeter wave devi

1991-05-31

1992-12-29

LaRoche, Eugene R.

Wave transmission lines and networks

Resonators

With tuning

333221, 333232, 333246, 334 45, H01P 700, H01P 706

Patent

active

051755211

ABSTRACT:
A miniature, electrostatically actuated, variable impedance circuit element which is operably tunable in response to control signals. With integrated circuit, thin film processing a fixed circuit member is fabricated on a substrate and a movable circuit member is fabricated over the substrate and is movable relative to the fixed circuit member in response to electrostatic fields produced at armature tabs when the control signals are selectively applied to rows of control electrodes. Embodiments include a variable capacitor and a variable ring resonator.

REFERENCES:
patent: 4096453 (1978-06-01), Rogers
patent: 4472690 (1984-09-01), Hallford
patent: 4716389 (1987-12-01), Gawronski et al.
patent: 4906956 (1990-03-01), Kakihana
patent: 4922253 (1990-05-01), Nathanson et al.
patent: 5043043 (1991-10-01), Howe et al.

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