Miniature condenser microphone and fabrication method therefor

Details Miniature condenser microphone and fabrication method therefor Miniature condenser microphone and fabrication method therefor

2006-12-05

2006-12-05

Tran, Sinh (Department: 2615)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S174000, C381S113000

Reexamination Certificate

active

07146016

ABSTRACT:
An acoustic pressure type sensor fabricated on a supporting substrate is disclosed. The acoustic sensor is fabricated by depositing and etching a number of thin films on the supporting substrate and by machining the supporting substrate. The resulting structure contains a pressure sensitive, electrically conductive diaphragm positioned at a distance from an electrically conductive fixed electrode. In operation, the diaphragm deflects in response to an acoustic pressure and the corresponding change of electrical capacitance between the diaphragm and the fixed electrode is detected using an electrical circuit. Two or more such acoustic sensors are combined on the same supporting substrate with an interaural flexible mechanical connection, to form a directional sensor with a small surface area.

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