Miniature air bearings

Details Miniature air bearings Miniature air bearings

1993-06-30

1995-04-18

Footland, Lenard A.

Bearings

Linear bearing

Fluid bearing

384100, 384907, F16C 3206

Patent

active

054072808

ABSTRACT:
A miniature air bearing for supporting and guiding parts has a bearing surface of monocrystalline silicon. Nozzles are formed on the bearing surface by means of anisotropic etching for feeding air.

REFERENCES:
patent: 4738010 (1988-04-01), Ehrfeld et al.
patent: 4887914 (1989-12-01), Lin et al.
patent: 4946293 (1990-08-01), Helms
patent: 5098203 (1992-03-01), Henderson

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