Miniature 3-dimensional package for MEMS sensors

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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C073S540000, C257S416000, C257S678000, C385S017000, C385S018000, C385S019000

Reexamination Certificate

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06918297

ABSTRACT:
An apparatus for mechanically mounting one or more Micro Electro-Mechanical System (MEMS) sensors on a stable, structurally sound base, the base being a generally cubical block formed in a ceramic substrate having a plurality of substantially planar and mutually orthogonal surfaces, wherein a first one of the surfaces is structured for rotationally interfacing with a host structure that is to be monitored; one or more of the remaining surfaces is structured for mechanically mounting of a MEMS sensor; and a plurality of electrical signal carriers communicate between each of the MEMS sensor mounting surfaces and a plurality of electrical interface contacts positioned on the interfacing surface.

REFERENCES:
patent: 6109105 (2000-08-01), Kubena et al.
patent: 6577134 (2003-06-01), Farruggia et al.
patent: 2003/0209789 (2003-11-01), Hanson et al.
patent: 2004/0085159 (2004-05-01), Kubena et al.

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