Data processing: generic control systems or specific application – Specific application – apparatus or process – Specific application of pressure responsive control system
Reexamination Certificate
2011-04-12
2011-04-12
Von Buhr, M. N. (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Specific application of pressure responsive control system
C454S187000
Reexamination Certificate
active
07925390
ABSTRACT:
An outer dust collecting filter covers a casing an intake port and an outer fan flows air from an external environment into the casing via the outer dust collecting filter. A clean chamber has an intake port within the casing, an inner dust collecting filter for covering the intake port, and an inner fan for flowing the air within the casing. A control unit controls fan rotating speeds so that a measured pressure within the casing becomes higher at a set value than a measured pressure in the external environment, and a measured pressure within the clean chamber becomes higher at a set value than the measured pressure within the casing.
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Jingu Takahiro
Miyazaki Yusuke
Zama Kazuhiro
Buhr M. N. Von
Crowell & Moring LLP
Hitachi High-Technologies Corporation
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