MIM structure and fabrication process with improved...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

Reexamination Certificate

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C257S296000, C438S239000, C438S957000

Reexamination Certificate

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10798959

ABSTRACT:
An MIM structure and method for forming the same the method including forming a bottom conductive electrode overlying a semiconducting substrate; forming a first protection layer on the conductive electrode; forming a dielectric layer on the first protection layer; and, forming an upper conductive electrode on the dielectric layer to form a metal-insulator-metal (MIM) structure.

REFERENCES:
patent: 6759703 (2004-07-01), Matsuhashi
patent: 6916722 (2005-07-01), Huang et al.
patent: 2002/0098644 (2002-07-01), Ohtsuki
patent: 2005/0040481 (2005-02-01), Shimizu et al.

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