MIM element with a doped hard carbon film

Details MIM element with a doped hard carbon film MIM element with a doped hard carbon film

1990-02-22

1992-08-25

Miller, Stanley D.

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

359 79, 359 87, 423446, 156DIG68, G02F 11343, G02F 11333, B01J 306

Patent

active

051423901

ABSTRACT:
Disclosed herein is an MIM device having a hard carbon film as the insulator. The hard carbon film contains at least one of the following elements: a group III element, a group IV element, a group V element, an alkali metal element, an alkaline earth metal element, nitrogen, oxygen, a chalcogen element or a halogen element.

REFERENCES:
patent: 4600274 (1986-07-01), Morozumi
patent: 4932331 (1990-06-01), Kurihara et al.
patent: 5015494 (1991-05-01), Yamazaki
Spitsyn et al, Progress in Crystal Growth and Characterization, vol. 17, No. 2, Dec. 1988, "Diamond and Diamond Like Films: Deposition . . . Properties", pp. 154-156.
Han et al., Diamond and Diamond-Like Materials Synthesis, Apr. 9, 1988, "Iron Doped Amorphous Hydrogenated Carbon Nitride", pp. 23-26.
Ebihara et al., Diamond and Diamond-Like Materials Synthesis, Apr. 9, 1988, "Amorphous Carbon Film Preparation Using a Reactive Pulsed Inductive Plasm", pp. 45-48.
Woollam et al, Technology Update on Diamond Films, Apr. 25, 1989, "Diamondlike Carbon as a Moisture Barrier and Antireflecting Coating on Optical Materials", pp. 27-32.

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