MIM cold-cathode electron emission elements

Details MIM cold-cathode electron emission elements MIM cold-cathode electron emission elements

1989-10-31

1993-04-13

Yusko, Donald J.

Electric lamp and discharge devices

Cathode ray tube

Ray generating or control

313310, H01J 2946

Patent

active

052026051

ABSTRACT:
An MIM type of electron emission element having a thin insulating film formed below an electron emission region of a metal layer, with that electron emission region of the metal layer consisting of an array of thick and thin portions, distributed throughout the electron emission region. Improved efficiency and uniformity of of emission are obtained, due to the low resistance of the thick portions, which apply a supply voltage to the thin portions of the metal layer, while the thin portions can be made sufficiently thin to maximize the electron emission.

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patent: 3325733 (1967-06-01), Lemelson
patent: 3447043 (1969-05-01), Wallace
patent: 3447045 (1969-05-01), Hickmott
Sze; Semiconductor Devices, 1985, p. 472.
Feist; Research in Tunnel emmission; IEEE Spectrum Dec. 1964; pp. 57-66.
Journal of Applied Physics, vol. 45, No. 1, Jan. 1974, pp. 119-125, New York, US; D. G. Onn et al.: "Cryogenic thin-film electron emitters".

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