MIM capacitor structure and method of fabrication

Details MIM capacitor structure and method of fabrication MIM capacitor structure and method of fabrication

2007-06-26

2007-06-26

Everhart, Caridad (Department: 2891)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S393000, C257S528000, C257SE27048, C257SE21021

Reexamination Certificate

active

11452159

ABSTRACT:
A method of forming a metal-insulator-metal (MIM) capacitor wherein a plate of a MIM capacitor is formed in the entire thickness of a metallization layer of a semiconductor device. At least one thin conductive material layer is disposed within the material of the metallization layer to reduce the surface roughness of the metallization layer, thus improving the reliability of the MIM capacitor. The thin conductive material layer may comprise TiN, TaN, or WN and may alternatively comprise a barrier layer disposed over or under the TiN, TaN, or WN. One plate of the MIM capacitor is patterned using the same mask that is used to pattern conductive lines in a metallization layer, thus reducing the number of masks that are required to manufacture the MIM capacitor.

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