Wave transmission lines and networks – Long line elements and components – Strip type
Reexamination Certificate
2001-10-03
2003-04-15
Bettendorf, Justin P. (Department: 2817)
Wave transmission lines and networks
Long line elements and components
Strip type
C257S728000, C257S664000
Reexamination Certificate
active
06549105
ABSTRACT:
FIELD OF THE INVENTION
The present invention relates to the field of high frequency modules using millimeter waves or microwaves, and radio apparatuses employing such modules.
BACKGROUND OF THE INVENTION
One known millimeter waveguide using anisotropically etched silicon substrate is disclosed in IEEE MTT-S Digest pp. 797-800, 1996.
FIG. 10
shows the structure of a conventional millimeter wave transmission line. Silicon dioxide (SiO
2
)
902
is deposited on a silicon substrate
901
, and a microstrip line
903
is formed on the silicon dioxide
902
. A shielded microstrip line is created by sandwiching the silicon substrate
901
between a carrier substrate
904
coated with metal film, and another silicon substrate
905
processed by micromachining, to achieve a shielding structure. With this shielding structure, which uses air as the dielectric medium, a transmission line with low loss can be achieved.
In this type of millimeter transmission line, however, modularization by mounting other millimeter wave components such as an MMIC (Monolithic Microwave Integrated Circuit) may be difficult, because the microstrip line is supported by silicon dioxide in midair. There may also be a problem with strength. Two sheets of silicon substrate are processed by micromachining, and an unduly thick silicon dioxide film must be formed to ensure strength. These result in the need for complicated processing during manufacturing.
SUMMARY OF THE INVENTION
The present invention offers an inexpensive millimeter wave and microwave apparatus by facilitating processing of a millimeter wave module in which components such as a low-loss filter and MMIC are mounted.
A millimeter wave module of the present invention comprises first and second substrates. The first substrate comprises a cavity on one flat face, a conductor formed on the bottom and side faces of the cavity, a connection part formed on a flat face around the cavity and electrically connected to the conductor formed in the cavity, and an air layer inside the cavity. The second substrate made of dielectrics comprises, on one flat face, metal patterning of a microstrip filter and a connection part connected to the metal patterning. The second substrate is mounted on the first substrate, so that the connection part of the first substrate is attached to the connection part connected to the metal patterning of the second substrate, and that the metal patterning of the second substrate faces the air layer in the cavity of the first substrate and also covers the cavity.
With this configuration, a low-loss filter using air as dielectric loss free materials may be easily achieved, and a device face of MMIC may be protected without any degradation. In addition, a low-loss filter and MMIC may be easily connected.
Using a millimeter wave module manufactured in accordance with the above simple method, an inexpensive radio apparatus may be achieved.
REFERENCES:
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patent: 5990768 (1999-11-01), Takahashi et al.
patent: 6040806 (2000-03-01), Kushishi et al.
patent: 6074897 (2000-06-01), Degani et al.
patent: 6140144 (2000-10-01), Najafi et al.
patent: 0520434 (1992-12-01), None
International Search Report dated Mar. 1, 2002.
Drayton, et al., “Micromachined circuits for Mm-wave applications”, Proceedings of the 23rdEuropean Microwave Conference. Madrid, Sep. 6-9, 1993, Proceedings of the European Microwave Conference, Tunbridge Wells, Reed Exhibition Company, GB, pp. 587-588 (1993).
Presting, et al., “Silicon Monolithic MM-Wave Integrated Circuit (SIMMWIC) Devices Mounted Up-Side-Down on a Copper Heat Sink Integral With Cavity Resonator”, IEEE Transactions on Microwave Theory and Techniques, vol. 42, pp. 1837-1841 (1994).
Sangawa Ushio
Takahashi Kazuaki
Bettendorf Justin P.
RatnerPrestia
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