Middle layer of die structure that comprises a cavity that...

Details Middle layer of die structure that comprises a cavity that... Middle layer of die structure that comprises a cavity that...

2007-11-06

2007-11-06

Tran, Len (Department: 1725)

Oscillators

Molecular or particle resonant type

C331S003000

Reexamination Certificate

active

10831812

ABSTRACT:
An apparatus in one example comprises a die structure that comprises a middle layer, a first outside layer, and a second outside layer. The middle layer comprises a cavity that holds an alkali metal, and one of the first outside layer and the second outside layer comprises a channel that leads to the cavity. The middle layer, the first outside layer, and the second outside layer comprise dies from one or more wafer substrates.

REFERENCES:
patent: 5192921 (1993-03-01), Chantry et al.
patent: 5248883 (1993-09-01), Brewer et al.
patent: 6570459 (2003-05-01), Nathanson et al.
patent: 2002/0163394 (2002-11-01), Hollberg et al.
patent: 2005/0184815 (2005-08-01), Lipp et al.
U.S. Appl. No. 60/534,420.

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