Middle layer of die structure that comprises a cavity that...

Details Middle layer of die structure that comprises a cavity that... Middle layer of die structure that comprises a cavity that...

2011-07-05

2011-07-05

Pascal, Robert (Department: 2817)

Oscillators

Molecular or particle resonant type

C331S003000

Reexamination Certificate

active

07973611

ABSTRACT:
An apparatus in one example comprises a die structure that comprises a middle layer, a first outside layer, and a second outside layer. The middle layer comprises a cavity that holds an alkali metal, and one of the first outside layer and the second outside layer comprises a channel that leads to the cavity. The middle layer, the first outside layer, and the second outside layer comprise dies from one or more wafer substrates.

REFERENCES:
patent: 3382452 (1968-05-01), Rempel et al.
patent: 5528028 (1996-06-01), Chu et al.
patent: 6297072 (2001-10-01), Tilmans et al.
patent: 6570459 (2003-05-01), Nathanson et al.

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