Mid-entry load lock for semiconductor handling system

Details Mid-entry load lock for semiconductor handling system Mid-entry load lock for semiconductor handling system

2004-11-10

2008-12-02

Keenan, James (Department: 3652)

Material or article handling

Process

Of moving material between zones having different pressures...

C414S217000, C414S939000

Reexamination Certificate

active

07458763

ABSTRACT:
In a system having a number of semiconductor processing modules sharing a common vacuum environment, a mid-entry load lock is provided to permit insertion and removal of wafers into the vacuum environment at a point between various other robotic handlers, process modules, and load locks. This arrangement permits increased flexibility in scheduling when multiple wafers are processed concurrently.

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