Microwave wafer probe having replaceable probe tip

Details Microwave wafer probe having replaceable probe tip Microwave wafer probe having replaceable probe tip

1988-11-04

1989-07-18

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, 324 73PC, 333246, G01R 3100, H01P 308

Patent

active

048496898

ABSTRACT:
A microwave wafer probe having a replaceable planar transmission line probe tip which detachably connects to a planar transmission line circuit board within the probe head. The circuit board may include passive and/or active electrical circuit components interconnecting its conductors which, due to the detachable interconnection with the probe tip, do not have to be replaced if the probe tip should be damaged. The detachable interconnection between the probe tip and the circuit board is tolerant to misalignment of the two elements because the interconnected end portions of the respective conductors are shaped so as to maintain the impedance between the two elements substantially constant despite misalignment. Preferably, both the circuit board and the detachable tip include coplanar transmission lines interconnected by compressing the overlapping end portions of their conductors together.

REFERENCES:
patent: 4697143 (1987-09-01), Lockwood et al.
patent: 4764723 (1988-08-01), Strid
C. Barsotti et al, "New Probe Cards Replace Needle Types"; Semiconductor International; Aug. 1988; pp. 98-101.
Cascade Microtech, Inc., "Wide Probe Assembly"; Drawing No. 500-0007-00; May 29, 1986.
Bailey et al; "A Neutron Hardness Assurance Based on High Frequency Probe Measurements"; IEEE Transaction On Nuclear Science, vol. NS-23, No. 6, Dec. 1976; pp. 2020-2023.

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